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dc.contributor.author김동준-
dc.contributor.author김용태-
dc.contributor.author박종완-
dc.date.accessioned2015-12-02T07:33:12Z-
dc.date.available2015-12-02T07:33:12Z-
dc.date.issued199704-
dc.identifier.citationVOL 15, NO 1, 172-172-
dc.identifier.other7625-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/19554-
dc.publisherBulletin of the Korean physical society-
dc.subjectW-B-N-
dc.titleCharacteristics of tungsten boron nitride thin film by plasma enhanced chemical vapor deposition-
dc.typeConference Paper-
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