Effect of oxygen ion energy and annealing in formation of tin oxide thin films

Title
Effect of oxygen ion energy and annealing in formation of tin oxide thin films
Authors
송석균최원국정형진조준식최동수이정용백홍구고석근
Keywords
reactive ion-assited deposition
Issue Date
1997-04
Publisher
Japanese journal of applied physics, part 1.
Citation
VOL 36, NO 4A, 2281-2287
URI
http://pubs.kist.re.kr/handle/201004/19560
Appears in Collections:
KIST Publication > Article
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