The application of a plastic diaphragm for a silicon micropump

Title
The application of a plastic diaphragm for a silicon micropump
Authors
강인병손문탁Malcolm R HaskardNoel Samaan주병권
Keywords
MEMS; micropump; wafer bonding
Issue Date
1997-03
Publisher
SPIE proceedings
Citation
VOL 3046, 148-155
URI
http://pubs.kist.re.kr/handle/201004/19583
Appears in Collections:
KIST Publication > Conference Paper
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