A laser plasma x-ray lithography for 2.5 THz waveguide cavity

Title
A laser plasma x-ray lithography for 2.5 THz waveguide cavity
Authors
문성욱강호관주병권이윤희정재훈이상조오명환ICE TurcuCM Mann
Keywords
MEMS; LIGA; x-ray lithography
Issue Date
1997-04
Publisher
대한전기학회 MEMS 연구회 학술발표회 논문집 , 고려대
Citation
, 11-16
URI
http://pubs.kist.re.kr/handle/201004/19595
Appears in Collections:
KIST Publication > Conference Paper
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