Negative mask fabrication technique by laser writing for integrated optics

Title
Negative mask fabrication technique by laser writing for integrated optics
Authors
박경현변영태김명욱김선호최상삼W.R. ChoS.H. ParkU. Kim
Keywords
laser lithography
Issue Date
1997-03
Publisher
Optics & photonics news.
Citation
VOL 8, NO 3, 49-49
URI
http://pubs.kist.re.kr/handle/201004/19615
Appears in Collections:
KIST Publication > ETC
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