Oxygen atomic flux O* enhancement by gas-pulsed electron cyclotron resonance plasma

Title
Oxygen atomic flux O* enhancement by gas-pulsed electron cyclotron resonance plasma
Authors
박용주Patrick O’KeeffebKazunari OzasaHarunobu MutohYoshinobu Aoyagi민석기
Keywords
oxygen gas ECR plasma; gas pulsed plasma; radical flux; optical emission profile
Issue Date
1997-03
Publisher
Journal of applied physics
Citation
VOL 81, NO 5, 2114-2118
URI
http://pubs.kist.re.kr/handle/201004/19616
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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