Deep, three dimensional lithography with a laser-plasma x-ray source at 1nm wavelength

Title
Deep, three dimensional lithography with a laser-plasma x-ray source at 1nm wavelength
Authors
ICE. Turcu문성욱CM MannR AllottN LisiBJ MaddisonSE HuqNS Kim
Keywords
three dimensional lithography
Issue Date
1997-02
Publisher
Micro and nano engineering (MNE).
Citation
, 541-544
URI
http://pubs.kist.re.kr/handle/201004/19623
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE