Experimental analysis on the anodic bonding with an evaporated glass layer

Title
Experimental analysis on the anodic bonding with an evaporated glass layer
Authors
최우범주병권이윤희정지원M. R. Haskard이남양성만영오명환
Keywords
bonding; insulating film; glass film
Issue Date
1997-12
Publisher
Journal of micromechanics and microengineering
Citation
VOL 7, NO 4, 316-322
URI
http://pubs.kist.re.kr/handle/201004/19650
ISSN
0960-1317
Appears in Collections:
KIST Publication > Article
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