Thermal stability of Cu films on TiN/Ti/Si(100) by partially ionized beam deposition

Title
Thermal stability of Cu films on TiN/Ti/Si(100) by partially ionized beam deposition
Authors
장홍규최원국고석근K. H. KimD. J. ChoiS. HanS. C. Choi정형진
Keywords
thermal stability
Issue Date
1997-01
Publisher
Mat. res. soc. symp. proc.
Citation
VOL 438, 387-?
URI
http://pubs.kist.re.kr/handle/201004/19785
Appears in Collections:
KIST Publication > Conference Paper
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