Polymerization of N-(tert-butyldimethylsilyloxy)maleimide and applications of the polymers as resist materials

Title
Polymerization of N-(tert-butyldimethylsilyloxy)maleimide and applications of the polymers as resist materials
Authors
안광덕김상태김진백정찬문
Keywords
N-(tert-butyldimethylsilyloxy)maleimide; silicon-containing maleimide polymers; acidolytic deprotection; resist materials
Issue Date
1997-01
Publisher
Journal of applied polymer science
Citation
VOL 66, 2507-2516
URI
http://pubs.kist.re.kr/handle/201004/19875
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE