Fabrication of micromechanical structures for integrated IR sensor application

Title
Fabrication of micromechanical structures for integrated IR sensor application
Authors
주병권박재석정문교염상섭서상희장진오명환
Keywords
MEMS; intergrated sensor; micromechanical structure
Issue Date
1997-01
Publisher
한국물리학회 가을 학술논문발표회 논문초록집 , 광운대
Citation
, 306-306
URI
http://pubs.kist.re.kr/handle/201004/19880
Appears in Collections:
KIST Publication > Conference Paper
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