Diamond deposition by multi-cathode DC PACVD

Title
Diamond deposition by multi-cathode DC PACVD
Authors
이재갑백영준이욱성은광용
Issue Date
1997-01
Publisher
The Korean journal of ceramics.
Citation
VOL 3, NO 1, 24-28
URI
http://pubs.kist.re.kr/handle/201004/19969
Appears in Collections:
KIST Publication > Article
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