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Issue DateTitleAuthor(s)
200111The present status and outlook of nano technology김용태
199702Characteristics of amorphous Ta-Si-N thin film for Cu metallization김동준; 정순필; 김용태; 민석기; 박종완
2016-04차세대 EUV 반도체 포토마스크 검사를 위한 CSM(Coherent Scattering Microscope) 시스템 개발김용태; 전영민; 박한용; 김용수; 성하민; 김점술; 이승범; 조현우; 이주한
199601Formation of circular-shaped crystalline phases embedded in amorphous PbTiO//3 thin films grown by MOCVD.염상섭; 왕채연; 김용태
199501Characteristics of RuOx thin films as a sacrificial diffusion barrier for Cu metallization김용태; H. S. Yoon; C. S. Kwon; H. N. Lee; J. Jang; 민석기
199601Study on physical properties of Cu-CVD for ULSI interconnects.김용태; Y. S. Kim; S. K. Kwak; C. S. Kwon; D. G. Jung; 민석기
200207The effects of various bottom electrodes in MFM structure on the ferroelectric properties of SrBi2Nb2O9 thin films using RF magnetron sputtering최훈상; 이종한; 임건식; 강민정; 최인훈; 김용태; 김성일
200007Fabrication of noble quantum wire structures grown by low pressure MOCVD using selective area epitaxy김성일; 김제원; 박영균; 김용태
199501질소이온 주입된 질화텅스텐박막의 구리배선용 확산방지막 특성 .김용태; 권철순; 김동준; 민석기
199503Deposition and properties of PbTiO//3 thin films on various substrates by metal-organic chemical vapor deposition.김용태; Y. S. Yoon; C. H. Wang; S. K. Koh; S. S. Yom