Multi-substrate bonding using anodic bonding method

Title
Multi-substrate bonding using anodic bonding method
Authors
주병권이덕중최우범한정인조경인이광배장진오명환
Keywords
MEMS
Issue Date
1997-01
Publisher
센서기술학술대회 논문집 , 서울대
Citation
, 221-226
URI
http://pubs.kist.re.kr/handle/201004/20012
Appears in Collections:
KIST Publication > Conference Paper
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