Particle deposition velocities on a rotating wafer

Title
Particle deposition velocities on a rotating wafer
Authors
안강호배귀남이춘식
Keywords
particle deposition velocity; rotating wafer; rotatingspeed
Issue Date
1996-09
Publisher
Proceedings of the 13th international symposium on contamination control.
Citation
, 465-469
URI
http://pubs.kist.re.kr/handle/201004/20056
Appears in Collections:
KIST Publication > Conference Paper
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