Transient characteristics of nitrogen gas-pulsed electron cyclotron resonance plasma

Title
Transient characteristics of nitrogen gas-pulsed electron cyclotron resonance plasma
Authors
박용주민석기Kazunari OzasaPatrick O
Keywords
gas-pulsed plasma
Issue Date
1997-01
Publisher
Journal of Vacuum Scienc & Technology A
Citation
VOL 14, NO 5, 2814-2819
URI
http://pubs.kist.re.kr/handle/201004/20062
Appears in Collections:
KIST Publication > Article
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