Surface modification of polymer and ceramic by ion beam in reactive gases environment

Title
Surface modification of polymer and ceramic by ion beam in reactive gases environment
Authors
고석근최원국손용배최영준박성철정형진
Issue Date
1996-01
Publisher
1996 proceedings of 3rd international seminar on hybrid microelectronics and multichip packing (ISHM
Citation
, 35-42
URI
http://pubs.kist.re.kr/handle/201004/20063
Appears in Collections:
KIST Publication > Conference Paper
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