Cu films deposited by a partially ionized beam (PIB)

Title
Cu films deposited by a partially ionized beam (PIB)
Authors
최원국고석근정형진김기환
Issue Date
1997-01
Publisher
Thin solid films
Citation
VOL 287, 266-270
URI
http://pubs.kist.re.kr/handle/201004/20065
Appears in Collections:
KIST Publication > Article
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