Fabrication and characterization of DLC-coated field emitter arrays

Title
Fabrication and characterization of DLC-coated field emitter arrays
Authors
고창기주병권이윤희Jung Ho Park오명환
Keywords
field emitter; CVD coatings; carbon; electron field emission; vacuum microelectronics; field emission display; micromachining; DLC-coated silicon tip
Issue Date
1996-07
Publisher
Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia.
Citation
, 226-230
URI
http://pubs.kist.re.kr/handle/201004/20109
Appears in Collections:
KIST Publication > Conference Paper
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