Fabrication of self-aligned silicon field emitters coated with diamond-like carbon

Title
Fabrication of self-aligned silicon field emitters coated with diamond-like carbon
Authors
주병권오명환S. J. LeeS. N. LeeS. W. LeeD. JeonK. R. Lee
Keywords
field emitter; field emission display; micromachining; diamond-coated silicon tip
Issue Date
1996-07
Publisher
Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia.
Citation
, 283-287
URI
http://pubs.kist.re.kr/handle/201004/20110
Appears in Collections:
KIST Publication > Conference Paper
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