Structure and mechanical properties of Si incorporated diamond-like carbon films prepared by PACVD.

Title
Structure and mechanical properties of Si incorporated diamond-like carbon films prepared by PACVD.
Authors
이광렬은광용김명근최준엽
Keywords
diamond-like carbon
Issue Date
1996-11
Publisher
Proceedings of the 1st international diamond symposium, 5-7 November 1996, Seoul, Korea
Citation
, 164-169
URI
http://pubs.kist.re.kr/handle/201004/20195
Appears in Collections:
KIST Publication > Conference Paper
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