A study on hermetic glass sealing using a modified direct bonding method

Title
A study on hermetic glass sealing using a modified direct bonding method
Authors
주병권이윤희오명환C. G. KoI. B. KangP. WhiteN. SamaanM. R. Haskard
Keywords
MEMS
Issue Date
1996-12
Publisher
MRS 1996 fall meeting, Boston, USA.
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/20205
Appears in Collections:
KIST Publication > Conference Paper
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