Thickness dependence of room temperature permittivity of polycrystalline BaTiO//3 thin films by radio-frequency magnetron sputtering.

Title
Thickness dependence of room temperature permittivity of polycrystalline BaTiO//3 thin films by radio-frequency magnetron sputtering.
Authors
장진욱정수진조운조최상삼한택상
Keywords
BaTiO//3 thin films
Issue Date
1996-01
Publisher
Mat. res. soc. symp. proc.
Citation
v. 433, 6322-6327
URI
http://pubs.kist.re.kr/handle/201004/20268
Appears in Collections:
KIST Publication > Conference Paper
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