Surface analysis of PZT film prepared by sputtering method

Title
Surface analysis of PZT film prepared by sputtering method
Authors
김영관박주상추정우손병청이전국
Keywords
스퍼터; PZT; 표면 분석
Issue Date
1996-01
Publisher
한국진공학회지
Citation
VOL 5, NO 2, 107-112
URI
http://pubs.kist.re.kr/handle/201004/20308
Appears in Collections:
KIST Publication > Article
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