Surfae analysis of PZT film prepared by sputtering method.

Title
Surfae analysis of PZT film prepared by sputtering method.
Authors
김영관박주상추정우손병청이전국
Issue Date
1996-01
Publisher
한국진공학회지; Journal of Korean vacuum society
Citation
v. 5, no. 2, 107-?
URI
http://pubs.kist.re.kr/handle/201004/20309
Appears in Collections:
KIST Publication > Article
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