Study of temperature dependent conductivity of Ta, Ta-Si-N thin films.

Title
Study of temperature dependent conductivity of Ta, Ta-Si-N thin films.
Authors
김용태S. P. JeongD. J. KimH. N. Lee민석기
Issue Date
1996-01
Publisher
한국물리학회 제 72 회 학술논문발표회
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/20313
Appears in Collections:
KIST Publication > ETC
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