Lateral growth rate control of GaAs on patterned substrates by CCl//4 and CBr//4 during MOCVD.

Title
Lateral growth rate control of GaAs on patterned substrates by CCl//4 and CBr//4 during MOCVD.
Authors
김성일김무성민석기김용황성민민병돈손창식김은규
Keywords
MOCVD
Issue Date
1996-01
Publisher
Journal of crystal growth
Citation
, 665-668
URI
http://pubs.kist.re.kr/handle/201004/20382
ISSN
0022-0248
Appears in Collections:
KIST Publication > Article
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