Effects of the phosphorus doping level and excess silicon on the oxidation of tungsten polycide

Title
Effects of the phosphorus doping level and excess silicon on the oxidation of tungsten polycide
Authors
정회환이종현주병권김영조정관수
Keywords
tugnsten polycide; phosphorus doping
Issue Date
1996-10
Publisher
Journal of the Korean Physical Society
Citation
VOL 29, NO 5, 658-663
URI
http://pubs.kist.re.kr/handle/201004/20421
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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