Preparation of silicon oxide films using electron cyclotron resonance oxygen plasma

Title
Preparation of silicon oxide films using electron cyclotron resonance oxygen plasma
Authors
허정수전법주윤용수정일현오인환임태훈
Issue Date
1996-01
Publisher
Theories and applications of chem. res.
Citation
VOL 2, NO 1, 1001-?
URI
http://pubs.kist.re.kr/handle/201004/20436
Appears in Collections:
KIST Publication > Conference Paper
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