Diamond deposition by multi-cathode DC PACVD

Title
Diamond deposition by multi-cathode DC PACVD
Authors
이재갑이욱성백영준은광용
Keywords
diamond deposition; DC PACVD; multi-cathode; OES; Raman
Issue Date
1996-01
Publisher
Proceedings of the 1st International diamond symposium, 5-7 November 1996, Seoul, Korea
Citation
, 121-126
URI
http://pubs.kist.re.kr/handle/201004/20448
Appears in Collections:
KIST Publication > Conference Paper
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