플라즈마 화학 증착된 질화텅스텐 박막의 불순물거동 및 확산특성

Title
플라즈마 화학 증착된 질화텅스텐 박막의 불순물거동 및 확산특성
Authors
이창우김용태
Issue Date
1996-01
Publisher
새물리; Sae Mulli (The Korean physical society)
Citation
VOL 36, NO 4, 371-375
URI
http://pubs.kist.re.kr/handle/201004/20530
Appears in Collections:
KIST Publication > Article
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