A study on the film-formation mechanism by ionized cluster beam deposition.

Title
A study on the film-formation mechanism by ionized cluster beam deposition.
Authors
신치범이경호윤경석황경순문상흡조원일
Issue Date
1996-01
Publisher
공업화학
Citation
v. 7, no. 3, 464-472
URI
http://pubs.kist.re.kr/handle/201004/20555
Appears in Collections:
KIST Publication > Article
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