Study on formation of W-silicide in the doped-phosphorus poly-Si/SiO//2/Si-substrate.

Title
Study on formation of W-silicide in the doped-phosphorus poly-Si/SiO//2/Si-substrate.
Authors
정회환주병권오명환정관수
Issue Date
1996-01
Publisher
전자공학회논문지
Citation
VOL 제 33 권 A 편, 126-134
URI
http://pubs.kist.re.kr/handle/201004/20556
Appears in Collections:
KIST Publication > Article
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