고농도로 탄소도핑된 InGaAs 에피층의 전기적성질에 대한 급속열처리효과

Title
고농도로 탄소도핑된 InGaAs 에피층의 전기적성질에 대한 급속열처리효과
Authors
손창식김성일민병돈김태근김용김무성김은규민석기최인훈
Keywords
carbondoping; InGaAs; rapid thermal annealing
Issue Date
1996-05
Publisher
응용물리; Ungyong Mulli (The Korean physical society)
Citation
VOL 9, NO 3, 368-371
URI
http://pubs.kist.re.kr/handle/201004/20592
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE