Laser lithography system for the fabrication of optical waveguides

Title
Laser lithography system for the fabrication of optical waveguides
Authors
박경현변영태김명욱김선호최상삼조욱래박승한김웅
Keywords
광도파로; 광소자; 레이저 리소그래피
Issue Date
1997-04
Publisher
한국광학회지 (Hankook Kwanghak Hoeji)
Citation
VOL 8, NO 2, 169-173
URI
http://pubs.kist.re.kr/handle/201004/20598
ISSN
12256285
Appears in Collections:
KIST Publication > Article
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