The effect of H//2O from SOG on the reliability of sub-micron vias.

Title
The effect of H//2O from SOG on the reliability of sub-micron vias.
Authors
정우상김병준최길현이성민고영범
Keywords
H//2O emission from SOG
Issue Date
1995-08
Publisher
제 56 회 응용물리학회 학술강연회 , Kanazawa
Citation
VOL Process 기술 B, ?-?
URI
http://pubs.kist.re.kr/handle/201004/20619
Appears in Collections:
KIST Publication > Conference Paper
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