Fabrication of knife type Si tip array by orientatio dependent etching of single silicon substrate

Title
Fabrication of knife type Si tip array by orientatio dependent etching of single silicon substrate
Authors
정유호고창기김철주주병권오명환
Issue Date
1995-07
Publisher
'95 대한전기학회 하계학술대회논문집
Citation
, 1428-1430
URI
http://pubs.kist.re.kr/handle/201004/20646
Appears in Collections:
KIST Publication > Conference Paper
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