Enhanced via reliability by Al-reflow for multi-level metallization

Title
Enhanced via reliability by Al-reflow for multi-level metallization
Authors
박인선위영진이현덕박창수최길현정우상이상인이문용
Keywords
Al-reflow
Issue Date
1995-07
Publisher
International conference on VLSI and CAD (ICVC, 95)
Citation
VOL 95, NO 195, 29-32
URI
http://pubs.kist.re.kr/handle/201004/20651
Appears in Collections:
KIST Publication > Conference Paper
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