The effects of heat treatments of permalloy targets on the deposition rates of thin films

Title
The effects of heat treatments of permalloy targets on the deposition rates of thin films
Authors
김현태한석희김희중강일구김인응김상주
Keywords
박막; 증착속도; 퍼멀로이 타게트; 잔류응력
Issue Date
1995-05
Publisher
대한금속학회지; Journal of the Korean Institute of Metals
Citation
VOL 33, NO 5, 591-598
URI
http://pubs.kist.re.kr/handle/201004/20660
ISSN
02533847
Appears in Collections:
KIST Publication > Article
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