On the anisotropically etched bonding interface of directly bonded (100) silicon wafer pairs

Title
On the anisotropically etched bonding interface of directly bonded (100) silicon wafer pairs
Authors
주병권이윤희K. H. Tchah오명환
Keywords
micromachining; wafer bonding; interfacial oxide
Issue Date
1995-02
Publisher
Journal of the Electrochemical Society
Citation
VOL 142, NO 2, 547-553
URI
http://pubs.kist.re.kr/handle/201004/20675
ISSN
0013-4651
Appears in Collections:
KIST Publication > Article
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