In-situ process 에 의한 indium oxide 의 선택성장과 GaAs 패턴에칭 .

Title
In-situ process 에 의한 indium oxide 의 선택성장과 GaAs 패턴에칭 .
Authors
김은규K. OzasaY. Aoyaki민석기
Keywords
in-situ process
Issue Date
1995-03
Publisher
응용물리
Citation
v. 8, no. 2, 157-161
URI
http://pubs.kist.re.kr/handle/201004/20691
Appears in Collections:
KIST Publication > Article
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