Effect of ion irradiation on internal stress of amorphic carbon films produced by pulsed laser.

Title
Effect of ion irradiation on internal stress of amorphic carbon films produced by pulsed laser.
Authors
김원목이세광정병기김순광O. S. KimJ. S. Ro
Keywords
carbon
Issue Date
1995-12
Publisher
Thin solid films
Citation
v. 270, 237-242
URI
http://pubs.kist.re.kr/handle/201004/20712
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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