Lateral growth rate control of GaAs and AlGaAs by CCl//4 during MOCVD on patterned substrates.

Title
Lateral growth rate control of GaAs and AlGaAs by CCl//4 during MOCVD on patterned substrates.
Authors
김성일민석기김용김무성강준모황성민박양근
Keywords
MOCVD
Issue Date
1995-01
Publisher
The 2nd Korean semiconductor conference
Citation
, 393-394
URI
http://pubs.kist.re.kr/handle/201004/20845
Appears in Collections:
KIST Publication > Conference Paper
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