Lateral growth rate enhancement on patterned GaAs substrates with CCl//4 by MOCVD.

Title
Lateral growth rate enhancement on patterned GaAs substrates with CCl//4 by MOCVD.
Authors
김용김성일황성민김무성민석기
Keywords
GaAs
Issue Date
1995-01
Publisher
22nd Institute symp. compound semiconductor
Citation
VOL no. 145, 137-142
URI
http://pubs.kist.re.kr/handle/201004/20846
Appears in Collections:
KIST Publication > Conference Paper
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