Influences of sol-GEL derived thin Pb(Zr0.52Ti0.48)O3 layers as a buffer on RF sputtered Pb(Zr0.52Ti0.48)O3 thin films

Title
Influences of sol-GEL derived thin Pb(Zr0.52Ti0.48)O3 layers as a buffer on RF sputtered Pb(Zr0.52Ti0.48)O3 thin films
Authors
김태송김준한이전국정형진
Keywords
PZT; non-volatile memory; sputtering process; ferroelectric thin films
Issue Date
1995-01
Publisher
Integrated ferroelectrics
Citation
VOL 10, 55-61
URI
http://pubs.kist.re.kr/handle/201004/20855
ISSN
1058-4587
Appears in Collections:
KIST Publication > Article
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