Enhancement of side wall growth rate during MOVPE growth on patterned substrates with CCl//4.

Title
Enhancement of side wall growth rate during MOVPE growth on patterned substrates with CCl//4.
Authors
김용김무성김성일황성민강준모박양근민석기
Keywords
MOCVD
Issue Date
1995-01
Publisher
The 1st inter. conf. on low dimensional structures and devices
Citation
, 27-?
URI
http://pubs.kist.re.kr/handle/201004/20879
Appears in Collections:
KIST Publication > Conference Paper
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