Control of the lateral growth rate during MOCVD growth on patterned GaAs substrates with CCl//4.

Title
Control of the lateral growth rate during MOCVD growth on patterned GaAs substrates with CCl//4.
Authors
김성일김무성민석기김용
Keywords
MOCVD
Issue Date
1995-01
Publisher
Japan-Korea joint seminar on photovoltaics
Citation
, 173-178
URI
http://pubs.kist.re.kr/handle/201004/20890
Appears in Collections:
KIST Publication > Conference Paper
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