keV surface modification and thin film growth

Title
keV surface modification and thin film growth
Authors
고석근최원국윤영수송석균조준식김기환정형진
Issue Date
1995-01
Publisher
Proc. of the 2nd Korea-China symposium on ion beam modification of materials and thin film materials
Citation
, 95-101
URI
http://pubs.kist.re.kr/handle/201004/20926
Appears in Collections:
KIST Publication > Conference Paper
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