In-situ pattern deposition of In2O3 and pattern etching of GaAs

Title
In-situ pattern deposition of In2O3 and pattern etching of GaAs
Authors
김은규K. OzasaY. Aoyagi
Keywords
In-situ patterning
Issue Date
1994-09
Publisher
Applied physics letters
Citation
VOL 65, NO 7, 1635-1637
URI
http://pubs.kist.re.kr/handle/201004/21010
ISSN
00036951
Appears in Collections:
KIST Publication > Article
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