Fabrication of a Humidity Sensing Device using Silicon Thermopile

Title
Fabrication of a Humidity Sensing Device using Silicon Thermopile
Authors
김태윤주병권오명환박정호
Keywords
MEMS; micromachining; micromechanical structure; flow sensor
Issue Date
1994-04
Publisher
전자공학회논문지
Citation
VOL 31A, NO 4, 70-76
URI
http://pubs.kist.re.kr/handle/201004/21014
Appears in Collections:
KIST Publication > Article
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